Dual Beam - FIB (Focused Ion Beam) and Field Emission Gun SEM
Make: ThermoFisher Scientific Inc. USA
Model: Scios-2
Model: Scios-2
Specifications:
Electron Beam Column:
1. Thermal Schottky Field emitter with high resolution automatic alignments
2. Accelerating Voltage: 500V to 30kV, adjustable.
3. Beam current: 5pA to 100nA
4. Magnification: 10X to 1000000X
Electron Beam Column:
1. Thermal Schottky Field emitter with high resolution automatic alignments
2. Accelerating Voltage: 500V to 30kV, adjustable.
3. Beam current: 5pA to 100nA
4. Magnification: 10X to 1000000X
Ion Beam Column:
1. Accelerating voltage: 500 V to 30kV continuously variable
2. Ion Gun: Ga liquid metal ion gun
3. Probe current: 1.5pA to 65nA
4. Gas sources for deposition: Pt and C deposition by both electron and Ionbeam
1. Accelerating voltage: 500 V to 30kV continuously variable
2. Ion Gun: Ga liquid metal ion gun
3. Probe current: 1.5pA to 65nA
4. Gas sources for deposition: Pt and C deposition by both electron and Ionbeam
Detectors:
Chamber mounted ET detector, in lens SE, in-lens BSEdetectors, secondary ion detector, retractable STEM detector for BF, DF, and HAADF imaging,
CCD camera for observing stage and sample inside the chamber
Application:
(1) Fabrication of TEM lamella and STEM imaging
Chamber mounted ET detector, in lens SE, in-lens BSEdetectors, secondary ion detector, retractable STEM detector for BF, DF, and HAADF imaging,
CCD camera for observing stage and sample inside the chamber
Application:
(1) Fabrication of TEM lamella and STEM imaging
(2) Deposition using Pt & C at nm-μm scale.
(3) Sample milling and patterning in nm-μm scale using Ion Beam.
Sample requirements: Conducting samples with dimensions 10mm x 10mm x 1mm or less. Typical size of the TEM lamella 15μm x10μm.
Contact Details:
Professor In-Charge:
Prof. Piyush Jagtap
E-mail: piyushvj@mt.iitr.ac.in
Room No. - 132
